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Heart of Motion

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Q-motionシリーズカタログ英語版

小型モーターステージQ-motionシリーズを1冊にまとめました。

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ドキュメント名 Heart of Motion
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ファイルサイズ 2.4Mb
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取り扱い企業 ピーアイ・ジャパン株式会社 (この企業の取り扱いカタログ一覧)

このカタログ(Heart of Motion )の内容


Page 1:w w w . p i . w sHeart of MotionQ - M o t i o n M i n i a t u r e P o s i t i o n i n g S t a g e s

Page 2:2w w w . p i . w sWhy Q-Motion...?Why did we develop this product line? Q-Motion stands for a series of miniaturizedstages with piezomotor drive principle. Because PI received a large number ofenquiries, we noted an increased demand for these very small positioning axesand manipulators, for example, in mobile applications for measuring and medicaldevices, in industrial microassembly or use for research in ultrahigh vacuums andstrong magnetic fields.With Q-Motion, we have succeeded in developing a series of the smallest drivesyet available on the market that work precisely, reliably and dynamically. Forexample, the series consists of rotation stages with a rotary plate diameter of just14 mm and a linear stage with 21 mm width and an integrated incrementalencoder. Find more on the features and product versions on the following pages.“I‘m pleased to now be able to offer positioning solutions toour customers where classical drive technologies could only fulfillexpectations to a limited extent.”Mark Freyer, Head of Product Division Inertia DrivesSmall and fast: Q-614 miniaturized rotationstage with a turntable diameter of 14 mm onlyand a velocity up to 70°/s.

Page 3:3M O T I O N | P O S I T I O N I N GCloses a GapPI draws from a wealth of experience when it comes to implementing piezoceramic drives in positioning systems. However, PI is certainly not restricted to aspecial drive technology, but is always able to offer the optimum solution for themany different requirements in the field of motion and positioning.Piezo motors combine the high position resolution of the piezo actuators with theunlimited travel ranges of classical drives.The drives in the Q-Motion series are based on one piezoelectric inertia drivethat can now be more compactly integrated than an ultrasonic motor and is lessexpensive than a stepping drive.All piezomotor drive principles aredistinguished by:n High resolution to <1 nmnSelf-locking at rest with maxi-mum force, no heat generationat rest, no energy consumption,no servo jittern Compact designPI piezo motor technology covers a broad range of technicalspecifications.The best solution can be chosen to match the application.

Page 4:4w w w . p i . w sMaximum FlexibilityQ-Motion products are availablein various different configurations:nLinear positioning stage withtravel ranges up to 52 mmnRotation stages with platformØ of 14 mm, 22 and 32 mmnGoniometers in the hithertosmallest available dimensionson the marketThe piezoceramic actuators form the heart of the piezo inertia drive. It can becustomized to the special installation conditions of the customer. The electronicsare made available from the OEM module to the „intelligence on the chip“. Thismakes it easy to integrate the circuitry into customer-specific drivers.Individual axes can be stacked for multi-axis applications such as sample manipu-lation and adjustment of optical elements, detectors and fiber arrays.Parallel kinematic systems with six degrees of freedom that fit onto the palm ofthe hand are interesting with respect to the overall stiffness, accuracy and dynam-ics of all axes .The drive electronics can be designed asflexible as the motor. A motion-chip canbe integrated into an existing circuit board.

Page 5:5M O T I O N | P O S I T I O N I N GOperating PrinciplePiezo inertia drives are space-saving and inexpensive piezo-baseddrives with relatively high holding forces and a virtually unlimitedtravel range.They make use of the stick-slip effect (inertia effect) – acyclical alternation of static and sliding friction between a movingrunner and the drive element generated by the piezo element – fora continuous feed of the runner.The operating frequency of morethan 20 kHz enables the runner to be directly driven at velocities inexcess of 10 mm/s (70°/s).Tangential DriveA drive element mounted on the side of the runner allows linear orrotary motion and a particularly small design of the stage. In con-junction with suitable incremental encoders, linear and rotationstages are possible with a width of just over 20 mm and a height ofonly 10 mm. The sizes are even smaller for open-loop operationwithout sensor.

Page 6:6w w w . p i . w sPropertiesNanometer ResolutionDuring the slow control phase (stick-phase), in which the runner is moved, thedrive behaves in the same way as a clas-sical piezoceramic actuator. By varying thevoltage applied, the actuator can take anyposition and therefore achieves the highmotion resolution that is typical for piezo-ceramics. Together with an incrementalencoder for measuring the position, it ispossible to achieve high positioning accu-racy and repeatability of the motion overlong travel ranges.PIShift Rod DriveCompared with tangential drives, rod drives provide a larger coupling sur-face between the piezoceramic actuator and runner.This results in relative-ly high holding forces of up to 10 N.The runner is guided through the innerhole of the actuator, which still allows a very compact drive design.The roddrive is in products such as the position-controlled Q-545 linear stage witha width of 45 mm.

Page 7:7M O T I O N | P O S I T I O N I N GThe minimum incremental motion isspecified with 2 nm for closed-loop linearstages with incremental encoders (1 nmresolution).The small steps are performedreliably with the analog expansion of thepiezoelectric actuator.The maximum velocity is 10 mm/s with20 kHz operating frequency. The graphshows position vs. time over a short rangeof 0.3 ms and 3 µm travel. Even with asample frequency of 133 kHz, the profile islinear and the velocity constant.The unidirectional repeatability of a Q-522with 1 nm encoder resolution is 25 nm.Cost-EffectivePiezo inertia drives are based on a cost-effectivesingle actuator solution. Control is simple and caneven be integrated into existing circuitry.

Page 8:8w w w . p i . w s4w w w . p i . w s½ Linear stages, rotary stages andparallel kinematic robots withsix degrees of freedom½ Direct position measurementwith incremental encoder withup to 1 nm resolution (optional)½ Piezomotor driving principle:Self-locking when at rest,therefore no holding current,no power consumption, noheat generation and no servojitterQ-Motion Miniature stagesHigH resoLution, aFForDaBLe priCeApplicationsApplications can be found in industry andresearch. The small form factor and the va-cuum compatibility make Q-Motion stagesideal positioning tasks in Beamline Instru-mentation or electron microscopy. Againthe small form factor, combined with theself-locking, Q-Motion stages can be inte-grated in mobile devices for metrology ormedical applications.

Page 9:9M O T I O N | P O S I T I O N I N G5M o t i o n | p o s i t i o n i n gQ-Motion Linear stagesQ-Motion rotary stagesQ-Motion Parallel KinematicQ-521Q-Motion Miniature Linear Positioning StageVery Small Linear Positioning Stage with Position Control,High Resolution and Attractive PriceQ-522Q-Motion Miniature Linear StagePiezomotors for Small Dimensions, High Resolution and a Favorable PriceQ-545Q-Motion Precision Linear StageHigh Forces and Small Size Through PiezomotorsQ-614Q-Motion Miniature Rotation StageMinimum Dimensions: 14 mm Turntable DiameterQ-622Q-Motion Miniature Rotation StageMinimum Dimensions: 22 mm Turntable DiameterQ-821Q-Motion Miniature SpaceFab RobotPiezo-Motorized Inertia Drive, only 80 mm Side LengthQ-632Q-Motion Rotation StageCompact Through Piezomotor: 30 mm Turntable DiameterQ-845Q-Motion SpaceFAB Micro RobotPiezo-Motorized Inertia Drive, 1 nm Sensor ResolutionE-873Q-Motion Servo Controller1 Axis, for Positioners with Piezo Inertia Drives

Page 10:10w w w . p i . w sw w w . p i . w sQ-Motion Miniature Linear Positioning stagew i t H p o s i t i o n C o n t r o L , H i g H r e s o L u t i o n a n D at t r a C t i V e p r i C eQ-521½ Only 21 mm wide and 10 mm high½ Direct position measurement withintegrated incremental encoder(optional)½ Up to 1 nm encoder resolution½ Up to 2 nm minimum incrementalmotion½ XY mounting without adapter½ Travel range 12, 22 or 32 mm½ Velocity 10 mm/s½ Feed force 1 N½ Versions vacuum-compatible to10-9hPaPrecision-class micropositioning stageQ-Motion stages are distinguished by their extremelysmall design and high position resolution in the nanome-ter range. The piezomotor drive principle and the electri-cal operation are cost-efficient and can be customizedPIShift piezo inertia drivesSelf-locking when at rest, therefore no heat generationand no servo jitter. Velocity to 10 mm/s. 1 N holding force,1 N feed forceDirect-measuring principleVersions with noncontact optical linear encoder available.Resolution 4 nm or 1 nm, depending on the version.Versions with encoder feature a reference point switchFields of applicationIndustry and research. For metrology, microscopy, micro-manipulation, biotechnology and automation. Vacuumversions for 10-9hPa available. Nonmagnetic versions areavailable on request©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0

Page 11:11M O T I O N | P O S I T I O N I N Gw w w . p i . w s©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0Preliminary Data Q-521.130 Q-521.140/Q-521.14UQ-521.230 Q-521.240/Q-521.24UQ-521.330 Q-521.340/Q-521.34UQ-521.x00/Q-521.x0UUnitMotion and positioning 12 mmtravelrange,resolution4 nm12 mmtravelrange,resolution1 nm, UHVversionQ-521.14U22 mmtravelrange,resolution4 nm22 mmtravelrange,resolution1 nm,UHVversionQ-521.24U32 mmtravelrange,resolution4 nm32 mmtravelrange,resolution1 nm, UHVversionQ-521.34U12 mm to32 mmtravelrange,open-loop,UHVversionsQ-521.x0UActive axis X X X X X X XTravel range 12 12 22 22 32 32 12 to 32 mmIntegrated sensor LinearencoderLinearencoderLinearencoderLinearencoderLinearencoderLinearencoder–Sensor resolution 4 1 4 1 4 1 – nmMin. incremental motion 8 2 8 2 8 2 – nmUnidirectional repeatability overentire travel range25 25 25 25 30 30 – nmBidirectional repeatability overentire travel range40 40 40 40 50 50 – nmUnidirectional repeatability over100 µm travel range12 12 12 12 12 12 –Bidirectional repeatability over100 µm travel range24 24 24 24 24 24 – nmPitch / yaw over entiretravel range100 100 100 100 100 100 100 µradPitch / yaw over 100 µmtravel range1 1 1 1 1 1 1 µradMaximum velocity* 10 10 10 10 10 10 10 mm/sMechanical propertiesLoad capacity 10 10 10 10 10 10 10 NPush / pull force 1 1 1 1 1 1 1 NLength 30 30 32.5 32.5 42.5 42.5 30 to 42.5 mmWidth 21 21 21 21 21 21 21 mmHeight 10 10 10 10 10 10 10 mmDrive propertiesMotor type Piezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadriveMiscellaneousOperating temperature range 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 °CMaterial Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum AluminumCable length 1 1 1 1 1 1 1 mConnector Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D Sub-DRecommended controller E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-870* Typical velocity at a control frequency of 20 kHz

Page 12:12w w w . p i . w sQ-522 linear stage with incremental position sensorw w w . p i . w sQ-Motion Miniature Linear stages M a L L D i M e n s i o n s , H i g H r e s o L u t i o n a n D a F aV o r a B L e p r i C eQ-522½ Only 22 mm wide and 10 mm high½ Direct position measurement withIncremental encoder with up to1 nm resolution (optional)½ XY mounting without adapter½ Up to 2 nm minimum incrementalmotion½ Q-622 rotation stage mountablewithout adapter½ Travel range 6.5, 13 or 26 mm½ Velocity 10 mm/s½ Feed Force 1 N½ Versions vacuum-compatible to10-9hPaPrecision-class micropositioning stageQ-Motion stages have very small dimensions and a highposition resolution in the nanometer range. Thepiezomotor drive principle and the electrical operationare cost-efficient and can be customizedPIShift piezo inertia drivesSelf-locking when at rest, therefore no heat generationand no servo jitter. Velocity to 10 mm/s. 1 N holding force,1 N feed forceDirect-measuring principleVersions with noncontact optical linear encoder available.Resolution 4 nm or 1 nm, depending on the version.Versions with encoder feature a reference point switchFields of applicationIndustry and research. For metrology, microscopy, micro-manipulation, biotechnology and automation. Vacuumversions for 10-9hPa available. Nonmagnetic versions areavailable on request©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0

Page 13:13M O T I O N | P O S I T I O N I N Gw w w . p i . w s©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0Preliminary Data Q-522.030 Q-522.040/Q-522.04UQ-522.130 Q-522.140/Q-522.14UQ-522.230 Q-522.240/Q-522.24UQ-522.x00/Q-522.x0UUnitMotion and positioning 6.5 mmtravelrange,resolution4 nm6.5 mmtravelrange,resolution1 nm,UHVversionQ-522.04U13 mmtravelrange,resolution4 nm13 mmtravelrange,resolution1 nm,UHVversionQ-522.14U26 mmtravelrange,resolution4 nm26 mmtravelrange,resolution1 nm,UHVversionQ-522.24U6.5 mm to26 mmtravelrange,open-loop,UHVversionsQ-522.x0UActive axis X X X X X X XTravel 6.5 6.5 13 13 26 26 6.5 to 26 mmIntegrated sensor LinearencoderLinearencoderLinearencoderLinearencoderLinearencoderLinearencoder–Sensor resolution 4 1 4 1 4 1 – nmMin. incremental motion 8 2 8 2 8 2 – nmUnidirectional repeatability overentire travel range25 25 25 25 30 30 – nmBidirectional repeatability overentire travel range40 40 40 40 50 50 – nmUnidirectional repeatability over100 µm travel range12 12 12 12 12 12 –Bidirectional repeatability over100 µm travel range24 24 24 24 24 24 – nmPitch / yaw over entiretravel range100 100 100 100 100 100 100 µradPitch / yaw over 100 µmtravel range1 1 1 1 1 1 1 µradMaximum velocity* 10 10 10 10 10 10 10 mm/sMechanical propertiesLoad capacity 10 10 10 10 10 10 10 NPush / pull force 1 1 1 1 1 1 1 NLength 22 22 32 32 42 42 22 to 42 mmWidth 32 32 32 32 32 32 22 mmHeight 10 10 10 10 10 10 10 mmDrive propertiesMotor type Piezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadrivePiezoelec-tric inertiadriveMiscellaneousOperating temperature range 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 0 to 40 °CMaterial Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum AluminumMass, including cabling 107 107 118 118 128 128 68 to 88 gCable length 1 1 1 1 1 1 1 mConnector Sub-D Sub-D Sub-D Sub-D Sub-D Sub-D Sub-DRecommended controller E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-871, E-873 E-870* Typical velocity at a control frequency of 20 kHzThe Q-522 stage series replaces the LPS-22 series.

Page 14:14w w w . p i . w sw w w . p i . w sQ-Motion Precision Linear stageH i g H F o r C e s a n D s M a L L s i Z e t H r o u g H p i e Z o M o t o r sQ-545½ Only 45 mm wide½ Feed force 8 N½ Direct position measurement withincremental encoder with 1 nmresolution (optional)½ XY mounting without adapter½ Travel range 13 or 26 mm½ Velocity 10 mm/s½ Versions vacuum-compatible to10-9hPaPrecision-class micropositioning stageQ-Motion stages have a compact design and a high posi-tion resolution in the nanometer range. The piezomotordrive principle and the electrical operation are cost-effi-cient and can be customizedPIShift piezo inertia drivesSelf-locking when at rest, therefore no heat generationand no servo jitter. Velocity to 10 mm/s. 8 N holding force,8 N feed forceDirect-measuring principleVersions with noncontact optical linear encoder available.Resolution 1 nm. Versions with encoder feature areference point switchFields of applicationIndustry and research. For optical metrology, laser tech-nology, micromanipulation, biotechnology, photonicspackaging. Vacuum versions down to 10-9hPa available.Nonmagnetic versions are available on request©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0

Page 15:15M O T I O N | P O S I T I O N I N Gw w w . p i . w s©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0Q-545.2, dimensions in mm Q-545.1, dimensions in mmPreliminary Data Q-545.100/Q-545.10UQ-545.140/Q-545.14UQ-545.200/Q-545.20UQ-545.240/Q-545.24UUnit ToleranceMotion and Positioning 13 mm travelrange,open-loop,UHV versionQ-545.10U13 mm travelrange, 1 nmresolution,UHV versionQ-545.14U26 mm travelrange,open-loop,UHV versionQ-545.20U26 mm travelrange,resolution 1 nm,UHV versionQ-545.24UActive axis X X X XTravel 13 13 26 26 mmIntegrated sensor – Linear encoder – Linear encoderSensor resolution – 1 – 1 nmMin. incrementalmotion500 (open-loop) 6 500 (open-loop) 6 nm typ.Unidirectional repeatability – 0.018 – 0.018 µmAngular crosstalk /-50 /-50 /-80 /-80 µradLinear crosstalk /-1 /-1 /-2 /-2 µmMaximum velocity 10 10 10 10 mm/s min.Reference point switch – Optical – OpticalMechanical PropertiesLoad capacity 10 10 10 10 NHolding force, deenergized 8 8 8 8 N min.Push / pull force 8 8 8 8 N typ.Drive PropertiesMotor Type Piezoelectricinertia drivePiezoelectricinertia drivePiezoelectricinertia drivePiezoelectricinertia driveMiscellaneousOperating temperature range 0 to 40 0 to 40 0 to 40 0 to 40 °CMaterial Aluminum Aluminum Aluminum AluminumCable length Q-545.100: 2Q-545.10U: 1Q-545.140: 2Q-545.14U: 1Q-545.200: 2Q-545.20U: 1Q-545.240: 2Q-545.24U: 1mConnector Sub-D 15 Sub-D 15 Sub-D 15 Sub-D 15Recommended controller / driver E-870 E-871, E-873 E-870 E-871, E-873Ask about custom designs!The Q-545 stage series replaces the LPS-45 series.

Page 16:16w w w . p i . w sQ-Motion rotation stage Q-632, Q-622, Q-614, from left to rightw w w . p i . w sQ-Motion Miniature rotation stageM i n i M u M D i M e n s i o n s : 1 4 M M t u r n ta B L e D i a M e t e rQ-614½ Only 18 mm wide and 10 mm high½ Rotation range >360°½ Velocity 70°/s½ Drive torque 5 mNm½ Versions vacuum-compatible to10-9hPaPrecision-class micropositioning stageQ-Motion stages have very small dimensions and ahigh position resolution in the nanometer range. Thepiezomotor drive principle and the electrical operationare cost-efficient and can be customizedPIShift piezo inertia drivesSelf-locking at rest, thus no heat generation. Velocity to70°/s. 6 mNm holding torque, 5 mNm drive torqueFields of applicationIndustry and research. For metrology, microscopy, micro-manipulation, biotechnology and automation. Vacuumversions for 10-9hPa available. Nonmagnetic versions areavailable on request©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0

Page 17:17M O T I O N | P O S I T I O N I N GQ-614, dimensions in mmw w w . p i . w s©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0Preliminary Data Q-614.900 Q-614.90U Unit ToleranceMotion and positioningActive axis θZθZRotation range >360 >360 °Resolution 1* 1* µradMin. incremental motion 100* 100* µrad typ.Maximum velocity, open-loop 70 70 °/sMechanical propertiesLoad capacity 1 1 NHolding torque, de-energized 6 6 mNm min.Torque 5 5 mNm typ.Length 18 18 mmWidth 18 18 mmHeight 10 10 mmTurntable diameter 14 14 mmDrive propertiesMotor type Piezoelectric inertia drive Piezoelectric inertia driveMiscellaneousOperating temperature range 0 to 40 0 to 40 °CMaterial Aluminum AluminumMass without cable 9 9 gCable length 1 1 mConnector Sub-D Sub-DRecommended controller E-870 E-870Ask about custom designs!The Q-614 stage series replaces the RPS-14 series.* Open-loop

Page 18:18w w w . p i . w sXYθZ-stack consisting of Q-522.240, Q-522.00 and Q-622.900w w w . p i . w sQ-Motion Miniature rotation stageM i n i M u M D i M e n s i o n s : 2 2 M M t u r n ta B L e D i a M e t e rQ-622½ Only 22 mm wide and 10 mm high½ Direct position measurementwith incremental encoder with0.55 µrad resolution (optional)½ Up to 2.2 µrad minimumincremental motion½ Rotation range >360°½ Velocity 70°/s½ Drive torque 5 mNm½ Mountable on the Q-522 linearstage without adapter½ Versions vacuum-compatible to10-9hPaPrecision-class micropositioning stageQ-Motion stages have very small dimensions and ahigh position resolution in the nanometer range. Thepiezomotor drive principle and the electrical operationare cost-efficient and can be customizedPIShift piezo inertia drivesSelf-locking at rest, thus no heat generation. Velocity to70°/s. 6 mNm holding torque, 5 mNm drive torqueFields of applicationIndustry and research. For metrology, microscopy, micro-manipulation, biotechnology and automation. Vacuumversions for 10-9hPa available. Nonmagnetic versions areavailable on request©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0

Page 19:19M O T I O N | P O S I T I O N I N GQ-622, dimensions in mmw w w . p i . w s©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0Preliminary Data Q-622.930 Q-622.900 Q-622.90U Unit ToleranceMotion and Positioning Miniature rotation stagewith position sensor forclosed-loop operationMiniature rotation stagewithout position sensorMiniature rotation stage,without position sensorfor ultrahigh vacuumup to 10-9hPaActive axis θZθZθZRotation range >360 >360 >360 °Integrated sensor Incremental encoder – –Sensor resolution 0.55 – – µradMin. incremental motion 2.2 100* 100* µrad typ.Unidirectional repeatability 3 – –Maximum velocity, open-loop 70 70 70 °/sMechanical PropertiesLoad capacity 1 1 1 NHolding torque, deenergized 6 6 6 mNm min.Torque 5 5 5 mNm typ.Length 22 22 22 mmWidth 22 22 22 mmHeight 10 10 10 mmTurntable diameter 22 22 22 mmDrive PropertiesMotor Type Piezoelectricinertia drivePiezoelectricinertia drivePiezoelectricinertia driveMiscellaneousOperating temperature range 0 to 40 0 to 40 0 to 40 °CMaterial Aluminum Aluminum AluminumMass without cable 15 12 12 gCable length 1 1 1 mConnector Sub-D Sub-D Sub-DRecommended controller E-871, E-873 E-870 E-870Ask about custom designs!The Q-622 stage series replaces the RPS-22 series.* Open-loop

Page 20:20w w w . p i . w sw w w . p i . w sQ-Motion rotation stageC o M pa C t t H r o u g H p i e Z o M o t o r : 3 0 M M t u r n ta B L e D i a M e t e rQ-632½ Only 32 mm wide and 10 mm high½ Direct position measurementwith incremental encoder with0.75 µrad resolution (optional)½ Up to 3 µrad minimum incremen-tal motion½ Rotation range >360°½ Velocity 45°/s½ Drive torque 6 mNm½ Versions vacuum-compatible to10-9hPa©PhysikInstrumente(PI)GmbH&Co.KG2015.Subjecttochangewithoutnotice.Latestreleasesavailableatwww.pi.ws.15/05/29.0Precision-class micropositioning stageQ-Motion stages have very small dimensions and a highposition resolution in the nanometer range. Thepiezomotor drive principle and the electrical operationare cost-efficient and can be customizedPIShift piezo inertia drivesSelf-locking at rest, thus no heat generation. Velocity to45°/s. 7 mNm holding torque, 6 mNm drive torqueFields of applicationIndustry and research. For metrology, microscopy, micro-manipulation, biotechnology and automation. Vacuumversions for 10-9hPa available. Nonmagnetic versions areavailable on request

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