L-812 高負荷対応リニアステージ

高負荷対応リニアステージ Stepper or Servo Motor • Spindle Drive • Cost Effective L-812 n 幅：114mm、トラベルレンジ：最大610mm n 精密ボールネジ、最大荷重 50kg n ステッピングモータまたはサーボモータ駆動 n ドライブトレインを折り畳んだコンパクトモデル n 縦置き用に保持ブレーキ付きモデル 要求の厳しい産業用アプリケーション向けリニアステージ 精密ボールネジ、高性能ステッピングモータまたはシンクロナスサーボモータ、ヘビーデューティー再循環ボールベ アリング、高精度ロータリーエンコーダにより、高負荷での連続動作と信頼性を実現します。オプションの保持ブ レーキにより、Z軸として使用することができます。また、ボールネジは分解せずに外部から再給油が可能なため、 高い信頼性と長寿命を実現します。 先駆的な設計 L-812シリーズの再循環ボールベアリングガイドは、高負荷容量とダイナミクスのために設計されています。モータ の高分解能化により、トラッキング性能の向上、トラッキングエラーの低減、セトリングタイムの改善を実現 シンクロナスサーボモーター 高い位置決め精度と広い回転速度範囲での高い過負荷耐性を持つモータです。高トルク、低イナーシャのため、高ダ イナミクスを実現します。長寿命、高性能、堅牢であるため、産業用オートメーション用途に優れた効果を発揮しま す。 ステッピングモーター 強力で低振動の2相ステッピングモーターにより、位置コントロールなしでも正確な位置決めが可能です。 オプション n ステッピングモータまたはシンクロナスサーボモータ n 保持ブレーキ n ロータリーエンコーダ、インクリメンタルまたはアブソリュート計測 n 全長を短くする折りたたみ式ドライブトレイン n オプションのアクセサリ：L-812.TT1 モーションプラットフォーム アプリケーション分野 n エレクトロニクス製造。マイクロアセンブリ。センサー/カメラ配置 n レーザー材料加工。レーザーマイクロマシニング n 産業用インクジェット印刷。マトリックスプレートおよびプリント回路基板の製造。 n テストおよび検査。 n 医療機器の製造。密閉溶接 遺伝子研究所のロボットシステム Page 1 19.10.2022 WWW.PI.WS

Motion Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 051400 051400B 051400BF 091400 091400B 091400BF 171400 171400B Active axes X X X X X X X X Travel range in X mm 102 102 102 204 204 204 407 407 Acceleration in X, unloa- ded m/s² Max. 10 10 10 10 10 10 10 10 Maximum velocity in X, unloaded mm/s 100 100 100 100 100 100 100 100 Straightness (Linear cros- stalk in Y with motion in X) µm Max. ±4 ±4 ±4 ±6 ±6 ±6 ±10 ±10 Flatness (Linear crosstalk in Z with motion in X) µm Max. ±4 ±4 ±4 ±6 ±6 ±6 ±10 ±10 Pitch (Rotational crosstalk in θY with motion in X) µrad Max. ±21 ±21 ±21 ±28.5 ±28.5 ±28.5 ±58.5 ±58.8 Yaw (Rotational crosstalk in θZ with motion in X) µrad Max. ±21 ±21 ±21 ±27 ±27 ±27 ±59 ±59 ___ Positioning Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 051400 051400B 051400BF 091400 091400B 091400BF 171400 171400B Integrated sensor Bidirectional repeatability in X µm Max. ±5 ±5 ±5 ±5 ±5 ±5 ±5 ±5 Positioning accuracy in X, uncalibrated µm Max. ±20 ±20 ±20 ±25 ±25 ±25 ±30 ±30 Minimum incremental motion in X µm Max. 3 3 3 3 3 3 3 3 Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Limit switches N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, NPN NPN NPN NPN NPN NPN NPN NPN Number of revolutions, motor encoder, bit width bit Resolution, motor enco- der Cts./rev. Resolution, motor enco- der, bit width bit Motor encoder: Sensor si- gnal ___ Drive Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 051400 051400B 051400BF 091400 091400B 091400BF 171400 171400B 2-phase 2-phase 2-phase 2-phase 2-phase 2-phase 2-phase 2-phase Drive type stepper stepper stepper stepper stepper stepper stepper stepper motor motor motor motor motor motor motor motor Maximum power con- sumption W 10 10 10 10 10 10 10 10 Full Motor resolution steps/ 200 200 200 200 200 200 200 200 rev. Nominal voltage V 48 48 48 48 48 48 48 48 Nominal current, RMS A Typ. 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 Peak current, RMS A Typ. 4.2 4.2 4.2 4.2 4.2 4.2 4.2 4.2 Drive force in negative di- rection of motion in X N Typ. 377 377 377 377 377 377 377 377 Drive force in positive di- rection of motion in X N Typ. 377 377 377 377 377 377 377 377 Torque constant N·m/A Typ. Resistance phase-phase Ω Typ. 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5 Inductance phase-phase mH 1.2 1.2 1.2 1.2 1.2 1.2 1.2 1.2 Back EMF, phase-phase, rotational V/kRPM Max. Number of pole pairs ___ Page 2 19.10.2022 WWW.PI.WS

Mechanical Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 051400 051400B 051400BF 091400 091400B 091400BF 171400 171400B Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Guide ting ball ting ball ting ball ting ball ting ball ting ball ting ball ting ball bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- de de de de de de de de Drive screw type Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Drive screw pitch mm 5 5 5 5 5 5 5 5 Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Holding brake gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- ding brake ding brake ding brake ding brake ding brake ding brake ding brake Holding force in X, passive N 500 500 500 500 500 Moved mass in X, unloa- ded g 2800 2800 2800 2800 2800 2800 2800 2800 Permissible push force in Y N Max. 250 250 250 250 250 250 250 250 Permissible push force in Z N Max. 500 500 500 500 500 500 500 500 Overall mass g 6800 6900 7000 7800 7900 8000 9900 10000 Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, black an- black an- black an- black an- black an- black an- black an- black an- Material odized, odized, odized, odized, odized, odized, odized, odized, stainless stainless stainless stainless stainless stainless stainless stainless steel steel steel steel steel steel steel steel ___ Miscellaneous Unit L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. 051400 051400B 051400BF 091400 091400B 091400BF 171400 171400B Connector HD D-sub HD D-sub HD D-sub HD D-sub HD D-sub HD D-sub HD D-sub HD D-sub 26-pin (m) 26-pin (m) 26-pin (m) 26-pin (m) 26-pin (m) 26-pin (m) 26-pin (m) 26-pin (m) Connector for motor en- coder C-663 C-663 C-663 C-663 C-663 C-663 C-663 C-663 G-901 G-901 G-901 G-901 G-901 G-901 G-901 G-901 Recommended controllers G-910 G-910 G-910 G-910 G-910 G-910 G-910 G-910 / drivers ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- lar control- lar control- lar control- lar control- lar control- lar control- lar control- lar control- ler ler ler ler ler ler ler ler Operating temperature range °C 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 ___ Motion Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 171400BF 251400 251400B 251400BF 059432 059432B 059432BF 099432 Active axes X X X X X X X X Travel range in X mm 407 610 610 610 102 102 102 204 Acceleration in X, unloa- ded m/s² Max. 10 10 10 10 10 10 10 10 Maximum velocity in X, unloaded mm/s 100 100 100 100 300 300 300 300 Straightness (Linear cros- stalk in Y with motion in X) µm Max. ±10 ±14 ±14 ±14 ±4 ±4 ±4 ±6 Flatness (Linear crosstalk in Z with motion in X) µm Max. ±10 ±14 ±14 ±14 ±4 ±4 ±4 ±6 Pitch (Rotational crosstalk in θY with motion in X) µrad Max. ±58.5 ±88.5 ±88.5 ±88.5 ±21 ±21 ±21 ±29 Yaw (Rotational crosstalk in θZ with motion in X) µrad Max. ±59 ±87 ±87 ±87 ±21 ±21 ±21 ±29 ___ Page 3 19.10.2022 WWW.PI.WS

Positioning Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 171400BF 251400 251400B 251400BF 059432 059432B 059432BF 099432 Incremental Incremental Incremental Incremental Integrated sensor rotary en- rotary en- rotary en- rotary en- coder coder coder coder Bidirectional repeatability in X µm Max. ±5 ±5 ±5 ±5 ±5 ±5 ±5 ±5 Positioning accuracy in X, uncalibrated µm Max. ±30 ±35 ±35 ±35 ±20 ±20 ±20 ±25 Minimum incremental motion in X µm Max. 3 3 3 3 1.5 1.5 1.5 1.5 Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Limit switches N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, NPN NPN NPN NPN NPN NPN NPN NPN Number of revolutions, motor encoder, bit width bit Resolution, motor enco- der Cts./rev. 10000 10000 10000 10000 Resolution, motor enco- der, bit width bit Motor encoder: Sensor si- A/B quadra- A/B quadra- A/B quadra- A/B quadra- gnal ture, RS- ture, RS- ture, RS- ture, RS- 422 422 422 422 ___ Drive Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 171400BF 251400 251400B 251400BF 059432 059432B 059432BF 099432 2-phase 2-phase 2-phase 2-phase Synchro- Synchro- Synchro- Synchro- Drive type stepper stepper stepper stepper nous servo nous servo nous servo nous servo motor motor motor motor motor motor motor motor Maximum power con- sumption W 10 10 10 10 Full Motor resolution steps/ 200 200 200 200 rev. Nominal voltage V 48 48 48 48 310 310 310 310 Nominal current, RMS A Typ. 4.2 4.2 4.2 4.2 1.5 1.5 1.5 1.5 Peak current, RMS A Typ. 4.2 4.2 4.2 4.2 4.5 4.5 4.5 4.5 Drive force in negative di- rection of motion in X N Typ. 377 377 377 377 800 800 800 800 Drive force in positive di- rection of motion in X N Typ. 377 377 377 377 800 800 800 800 Torque constant N·m/A Typ. 0.43 0.43 0.43 0.43 Resistance phase-phase Ω Typ. 0.5 0.5 0.5 0.5 10.1 10.1 10.1 10.1 Inductance phase-phase mH 1.2 1.2 1.2 1.2 17.5 17.5 17.5 17.5 Back EMF, phase-phase, rotational V/kRPM Max. 14.5 14.5 14.5 14.5 Number of pole pairs 4 4 4 4 ___ Page 4 19.10.2022 WWW.PI.WS

Mechanical Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 171400BF 251400 251400B 251400BF 059432 059432B 059432BF 099432 Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Guide ting ball ting ball ting ball ting ball ting ball ting ball ting ball ting ball bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- de de de de de de de de Drive screw type Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Drive screw pitch mm 5 5 5 5 5 5 5 5 Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Holding brake gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- ding brake ding brake ding brake ding brake ding brake ding brake ding brake ding brake Holding force in X, passive N 500 500 500 500 500 Moved mass in X, unloa- ded g 2800 2800 2800 2800 2800 2800 2800 2800 Permissible push force in Y N Max. 250 250 250 250 250 250 250 250 Permissible push force in Z N Max. 500 500 500 500 500 500 500 500 Overall mass g 10100 11900 12000 12100 7300 7400 7500 8300 Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, black an- black an- black an- black an- black an- black an- black an- black an- Material odized, odized, odized, odized, odized, odized, odized, odized, stainless stainless stainless stainless stainless stainless stainless stainless steel steel steel steel steel steel steel steel ___ Miscellaneous Unit L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. 171400BF 251400 251400B 251400BF 059432 059432B 059432BF 099432 Connector HD D-sub HD D-sub HD D-sub HD D-sub M15 9-pin M15 9-pin M15 9-pin M15 9-pin 26-pin (m) 26-pin (m) 26-pin (m) 26-pin (m) (m) (m) (m) (m) Connector for motor en- M15 15-pin M15 15-pin M15 15-pin M15 15-pin coder (m) (m) (m) (m) C-663 C-663 C-663 C-663 G-901 G-901 G-901 G-901 G-901 G-901 G-901 G-901 Recommended controllers G-910 G-910 G-910 G-910 G-910 G-910 G-910 G-910 / drivers ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- lar control- lar control- lar control- lar control- lar control- lar control- lar control- lar control- ler ler ler ler ler ler ler ler Operating temperature range °C 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 ___ Motion Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 099432B 099432BF 139432 179432 179432B 179432BF 259432 259432B Active axes X X X X X X X X Travel range in X mm 204 204 304 407 407 407 610 610 Acceleration in X, unloa- ded m/s² Max. 10 10 10 10 10 10 10 10 Maximum velocity in X, unloaded mm/s 300 300 300 300 300 300 300 300 Straightness (Linear cros- stalk in Y with motion in X) µm Max. ±6 ±6 ±10 ±10 ±10 ±10 ±14 ±14 Flatness (Linear crosstalk in Z with motion in X) µm Max. ±6 ±6 ±10 ±10 ±10 ±10 ±14 ±14 Pitch (Rotational crosstalk in θY with motion in X) µrad Max. ±29 ±29 ±59 ±59 ±59 ±59 ±87 ±87 Yaw (Rotational crosstalk in θZ with motion in X) µrad Max. ±29 ±29 ±59 ±59 ±59 ±59 ±87 ±87 ___ Page 5 19.10.2022 WWW.PI.WS

Positioning Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 099432B 099432BF 139432 179432 179432B 179432BF 259432 259432B Incremental Incremental Incremental Incremental Incremental Incremental Incremental Incremental Integrated sensor rotary en- rotary en- rotary en- rotary en- rotary en- rotary en- rotary en- rotary en- coder coder coder coder coder coder coder coder Bidirectional repeatability in X µm Max. ±5 ±5 ±5 ±5 ±5 ±5 ±5 ±5 Positioning accuracy in X, uncalibrated µm Max. ±25 ±25 ±30 ±30 ±30 ±30 ±35 ±35 Minimum incremental motion in X µm Max. 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Limit switches N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, NPN NPN NPN NPN NPN NPN NPN NPN Number of revolutions, motor encoder, bit width bit Resolution, motor enco- der Cts./rev. 10000 10000 10000 10000 10000 10000 10000 10000 Resolution, motor enco- der, bit width bit Motor encoder: Sensor si- A/B quadra- A/B quadra- A/B quadra- A/B quadra- A/B quadra- A/B quadra- A/B quadra- A/B quadra- gnal ture, RS- ture, RS- ture, RS- ture, RS- ture, RS- ture, RS- ture, RS- ture, RS- 422 422 422 422 422 422 422 422 ___ Drive Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 099432B 099432BF 139432 179432 179432B 179432BF 259432 259432B Synchro- Synchro- Synchro- Synchro- Synchro- Synchro- Synchro- Synchro- Drive type nous servo nous servo nous servo nous servo nous servo nous servo nous servo nous servo motor motor motor motor motor motor motor motor Maximum power con- sumption W Full Motor resolution steps/ rev. Nominal voltage V 310 310 310 310 310 310 310 310 Nominal current, RMS A Typ. 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 Peak current, RMS A Typ. 4.5 4.5 4.5 4.5 4.5 4.5 4.5 4.5 Drive force in negative di- rection of motion in X N Typ. 800 800 800 800 800 800 800 800 Drive force in positive di- rection of motion in X N Typ. 800 800 800 800 800 800 800 800 Torque constant N·m/A Typ. 0.43 0.43 0.43 0.43 0.43 0.43 0.43 0.43 Resistance phase-phase Ω Typ. 10.1 10.1 10.1 10.1 10.1 10.1 10.1 10.1 Inductance phase-phase mH 17.5 17.5 17.5 17.5 17.5 17.5 17.5 17.5 Back EMF, phase-phase, rotational V/kRPM Max. 14.5 14.5 14.5 14.5 14.5 14.5 14.5 14.5 Number of pole pairs 4 4 4 4 4 4 4 4 ___ Page 6 19.10.2022 WWW.PI.WS

Mechanical Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 099432B 099432BF 139432 179432 179432B 179432BF 259432 259432B Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Guide ting ball ting ball ting ball ting ball ting ball ting ball ting ball ting ball bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- de de de de de de de de Drive screw type Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Drive screw pitch mm 5 5 5 5 5 5 5 5 Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Holding brake gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- ding brake ding brake ding brake ding brake ding brake ding brake ding brake ding brake Holding force in X, passive N 500 500 500 500 500 Moved mass in X, unloa- ded g 2800 2800 2800 2800 2800 2800 2800 2800 Permissible push force in Y N Max. 250 250 250 250 250 250 250 250 Permissible push force in Z N Max. 500 500 500 500 500 500 500 500 Overall mass g 8400 8500 10400 10400 10500 10600 12500 12600 Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, black an- black an- black an- black an- black an- black an- black an- black an- Material odized, odized, odized, odized, odized, odized, odized, odized, stainless stainless stainless stainless stainless stainless stainless stainless steel steel steel steel steel steel steel steel ___ Miscellaneous Unit L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. 099432B 099432BF 139432 179432 179432B 179432BF 259432 259432B Connector M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin (m) (m) (m) (m) (m) (m) (m) (m) Connector for motor en- M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin coder (m) (m) (m) (m) (m) (m) (m) (m) G-901 G-901 G-901 G-901 G-901 G-901 G-901 G-901 Recommended controllers G-910 G-910 G-910 G-910 G-910 G-910 G-910 G-910 / drivers ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- lar control- lar control- lar control- lar control- lar control- lar control- lar control- lar control- ler ler ler ler ler ler ler ler Operating temperature range °C 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 ___ Motion Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 259432BF 059453 059453B 059453BF 099453 099453B 099453BF 179453 Active axes X X X X X X X X Travel range in X mm 610 102 102 102 204 204 204 407 Acceleration in X, unloa- ded m/s² Max. 10 10 10 10 10 10 10 10 Maximum velocity in X, unloaded mm/s 300 300 300 300 300 300 300 300 Straightness (Linear cros- stalk in Y with motion in X) µm Max. ±14 ±4 ±4 ±4 ±6 ±6 ±6 ±10 Flatness (Linear crosstalk in Z with motion in X) µm Max. ±14 ±4 ±4 ±4 ±6 ±6 ±6 ±10 Pitch (Rotational crosstalk in θY with motion in X) µrad Max. ±87 ±21 ±21 ±21 ±29 ±29 ±29 ±59 Yaw (Rotational crosstalk in θZ with motion in X) µrad Max. ±87 ±21 ±21 ±21 ±29 ±29 ±29 ±59 ___ Page 7 19.10.2022 WWW.PI.WS

Positioning Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 259432BF 059453 059453B 059453BF 099453 099453B 099453BF 179453 Incremental Absolute Absolute Absolute Absolute Absolute Absolute Absolute Integrated sensor rotary en- rotary en- rotary en- rotary en- rotary en- rotary en- rotary en- rotary en- coder coder, mul- coder, mul- coder, mul- coder, mul- coder, mul- coder, mul- coder, mul- ti-turn ti-turn ti-turn ti-turn ti-turn ti-turn ti-turn Bidirectional repeatability in X µm Max. ±5 ±5 ±5 ±5 ±5 ±5 ±5 ±5 Positioning accuracy in X, uncalibrated µm Max. ±35 ±20 ±20 ±20 ±25 ±25 ±25 ±30 Minimum incremental motion in X µm Max. 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Inductive, Limit switches N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- N/C con- tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, tact,, 5 V, NPN NPN NPN NPN NPN NPN NPN NPN Number of revolutions, motor encoder, bit width bit 12 12 12 12 12 12 12 Resolution, motor enco- der Cts./rev. 10000 Resolution, motor enco- der, bit width bit 24 24 24 24 24 24 24 Motor encoder: Sensor si- A/B quadra- gnal ture, RS- BiSS-C BiSS-C BiSS-C BiSS-C BiSS-C BiSS-C BiSS-C 422 ___ Drive Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 259432BF 059453 059453B 059453BF 099453 099453B 099453BF 179453 Synchro- Synchro- Synchro- Synchro- Synchro- Synchro- Synchro- Synchro- Drive type nous servo nous servo nous servo nous servo nous servo nous servo nous servo nous servo motor motor motor motor motor motor motor motor Maximum power con- sumption W Full Motor resolution steps/ rev. Nominal voltage V 310 310 310 310 310 310 310 310 Nominal current, RMS A Typ. 1.5 1.5 1.5 1.5 1.5 1.5 1.5 1.5 Peak current, RMS A Typ. 4.5 4.5 4.5 4.5 4.5 4.5 4.5 4.5 Drive force in negative di- rection of motion in X N Typ. 800 800 800 800 800 800 800 800 Drive force in positive di- rection of motion in X N Typ. 800 800 800 800 800 800 800 800 Torque constant N·m/A Typ. 0.43 0.43 0.43 0.43 0.43 0.43 0.43 0.43 Resistance phase-phase Ω Typ. 10.1 10.1 10.1 10.1 10.1 10.1 10.1 10.1 Inductance phase-phase mH 17.5 17.5 17.5 17.5 17.5 17.5 17.5 17.5 Back EMF, phase-phase, rotational V/kRPM Max. 14.5 14.5 14.5 14.5 14.5 14.5 14.5 14.5 Number of pole pairs 4 4 4 4 4 4 4 4 ___ Page 8 19.10.2022 WWW.PI.WS

Mechanical Properties Unit Toleran- L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. ce 259432BF 059453 059453B 059453BF 099453 099453B 099453BF 179453 Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Recircula- Guide ting ball ting ball ting ball ting ball ting ball ting ball ting ball ting ball bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- bearing gui- de de de de de de de de Drive screw type Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Drive screw pitch mm 5 5 5 5 5 5 5 5 Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Electroma- Holding brake gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- gnetic hol- ding brake ding brake ding brake ding brake ding brake ding brake ding brake ding brake Holding force in X, passive N 500 500 500 500 500 Moved mass in X, unloa- ded g 2800 2800 2800 2800 2800 2800 2800 2800 Permissible push force in Y N Max. 250 250 250 250 250 250 250 250 Permissible push force in Z N Max. 500 500 500 500 500 500 500 500 Overall mass g 12700 7300 7400 7500 8300 8400 8500 10400 Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, Aluminum, black an- black an- black an- black an- black an- black an- black an- black an- Material odized, odized, odized, odized, odized, odized, odized, odized, stainless stainless stainless stainless stainless stainless stainless stainless steel steel steel steel steel steel steel steel ___ Miscellaneous Unit L-812. L-812. L-812. L-812. L-812. L-812. L-812. L-812. 259432BF 059453 059453B 059453BF 099453 099453B 099453BF 179453 Connector M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin M15 9-pin (m) (m) (m) (m) (m) (m) (m) (m) Connector for motor en- M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin M15 15-pin coder (m) (m) (m) (m) (m) (m) (m) (m) G-901 G-901 G-901 G-901 G-901 G-901 G-901 G-901 Recommended controllers G-910 G-910 G-910 G-910 G-910 G-910 G-910 G-910 / drivers ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- ACS modu- lar control- lar control- lar control- lar control- lar control- lar control- lar control- lar control- ler ler ler ler ler ler ler ler Operating temperature range °C 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 ___ Motion Unit Toleran- ce L-812.179453B L-812.179453BF L-812.259453 L-812.259453B L-812.259453BF Active axes X X X X X Travel range in X mm 407 407 610 610 610 Acceleration in X, unloa- ded m/s² Max. 10 10 10 10 10 Maximum velocity in X, unloaded mm/s 300 300 300 300 300 Straightness (Linear cros- stalk in Y with motion in X) µm Max. ±10 ±10 ±14 ±14 ±14 Flatness (Linear crosstalk in Z with motion in X) µm Max. ±10 ±10 ±14 ±14 ±14 Pitch (Rotational crosstalk in θY with motion in X) µrad Max. ±59 ±59 ±87 ±87 ±87 Yaw (Rotational crosstalk in θZ with motion in X) µrad Max. ±59 ±59 ±87 ±87 ±87 ___ Page 9 19.10.2022 WWW.PI.WS

Positioning Unit Toleran- ce L-812.179453B L-812.179453BF L-812.259453 L-812.259453B L-812.259453BF Integrated sensor Absolute rotary en- Absolute rotary en- Absolute rotary en- Absolute rotary en- Absolute rotary en- coder, multi-turn coder, multi-turn coder, multi-turn coder, multi-turn coder, multi-turn Bidirectional repeatability in X µm Max. ±5 ±5 ±5 ±5 ±5 Positioning accuracy in X, uncalibrated µm Max. ±30 ±30 ±35 ±35 ±35 Minimum incremental motion in X µm Max. 1.5 1.5 1.5 1.5 1.5 Limit switches Inductive, N/C con- Inductive, N/C con- Inductive, N/C con- Inductive, N/C con- Inductive, N/C con- tact,, 5 V, NPN tact,, 5 V, NPN tact,, 5 V, NPN tact,, 5 V, NPN tact,, 5 V, NPN Number of revolutions, motor encoder, bit width bit 12 12 12 12 12 Resolution, motor enco- der Cts./rev. Resolution, motor enco- der, bit width bit 24 24 24 24 24 Motor encoder: Sensor si- gnal BiSS-C BiSS-C BiSS-C BiSS-C BiSS-C ___ Drive Properties Unit Toleran- ce L-812.179453B L-812.179453BF L-812.259453 L-812.259453B L-812.259453BF Drive type Synchronous servo Synchronous servo Synchronous servo Synchronous servo Synchronous servo motor motor motor motor motor Maximum power con- sumption W Full Motor resolution steps/ rev. Nominal voltage V 310 310 310 310 310 Nominal current, RMS A Typ. 1.5 1.5 1.5 1.5 1.5 Peak current, RMS A Typ. 4.5 4.5 4.5 4.5 4.5 Drive force in negative di- rection of motion in X N Typ. 800 800 800 800 800 Drive force in positive di- rection of motion in X N Typ. 800 800 800 800 800 Torque constant N·m/A Typ. 0.43 0.43 0.43 0.43 0.43 Resistance phase-phase Ω Typ. 10.1 10.1 10.1 10.1 10.1 Inductance phase-phase mH 17.5 17.5 17.5 17.5 17.5 Back EMF, phase-phase, rotational V/kRPM Max. 14.5 14.5 14.5 14.5 14.5 Number of pole pairs 4 4 4 4 4 ___ Mechanical Properties Unit Toleran- ce L-812.179453B L-812.179453BF L-812.259453 L-812.259453B L-812.259453BF Guide Recirculating ball Recirculating ball Recirculating ball Recirculating ball Recirculating ball bearing guide bearing guide bearing guide bearing guide bearing guide Drive screw type Ball screw Ball screw Ball screw Ball screw Ball screw Drive screw pitch mm 5 5 5 5 5 Holding brake Electromagnetic Electromagnetic Electromagnetic Electromagnetic Electromagnetic holding brake holding brake holding brake holding brake holding brake Holding force in X, passive N 500 500 500 500 Moved mass in X, unloa- ded g 2800 2800 2800 2800 2800 Permissible push force in Y N Max. 250 250 250 250 250 Permissible push force in Z N Max. 500 500 500 500 500 Overall mass g 10500 10600 12500 12600 12700 Aluminum, black an- Aluminum, black an- Aluminum, black an- Aluminum, black an- Aluminum, black an- Material odized, stainless odized, stainless odized, stainless odized, stainless odized, stainless steel steel steel steel steel ___ Page 10 19.10.2022 WWW.PI.WS

Miscellaneous Unit L-812.179453B L-812.179453BF L-812.259453 L-812.259453B L-812.259453BF Connector M15 9-pin (m) M15 9-pin (m) M15 9-pin (m) M15 9-pin (m) M15 9-pin (m) Connector for motor en- coder M15 15-pin (m) M15 15-pin (m) M15 15-pin (m) M15 15-pin (m) M15 15-pin (m) G-901 G-901 G-901 G-901 G-901 Recommended controllers G-910 G-910 G-910 G-910 G-910 / drivers ACS modular con- ACS modular con- ACS modular con- ACS modular con- ACS modular con- troller troller troller troller troller Operating temperature range °C 5 to 40 5 to 40 5 to 40 5 to 40 5 to 40 ___ Note regarding the maximum velocity of the L-812.xx1400B / L-812.xx1400BF: When vertically mounted: 40 mm/s. Note regarding the maximum velocity for L-812.xx94xx[B|BF]: A controller with 320 V DC intermediate voltage is necessary for reaching the maximum velocity. With this intermediate voltage the maximum velocity is reached both in an unloaded state and when fully loaded (50kg). Note regarding the design resolution of the L-812.xx1400[B|BF]: Value valid for full-step mode (full steps of 1.8°) Note regarding the moved mass: With L-812.TT1 platform: 3.4 kg. Note regarding the permissible push force in Z for L-812.xxxxxxB / L-812.xxxxxxBF: When vertically mounted: 300 N. For more information on the torques permitted for loading the L-812, see the diagram of load limits Technical data is specified on a granite table with a flatness of ±2µm. ___ Drawings / Images Load limit of the L-812 depending on the load mass and the distance of the center of gravity of the load from the center of the slider Page 11 19.10.2022 WWW.PI.WS

Drawings / Images L-812.xx94xx[B[F]], dimensions in mm Page 12 19.10.2022 WWW.PI.WS

Drawings / Images L-812.xx1400[B[F]], dimensions in mm Page 13 19.10.2022 WWW.PI.WS

Drawings / Images L-812.179432 with mounted L-812.TT1 motion platform L-812 XY combination with optional L-812.TT1 motion platform on top positioner Page 14 19.10.2022 WWW.PI.WS

Drawings / Images XY combination of V-857.586211E0 (bottom) and L-812.099432BF (top) Gantry setup of two V-857, two V-817, and one L-812 Page 15 19.10.2022 WWW.PI.WS

Order Information L-812.051400 High-load linear stage; 2-phase stepper motor; 102 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw L-812.051400B High-load linear stage; 2-phase stepper motor; 102 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake L-812.051400BF High-load linear stage; 2-phase stepper motor; 102 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake; folded drivetrain L-812.091400 High-load linear stage; 2-phase stepper motor; 204 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake L-812.091400B High-load linear stage; 2-phase stepper motor; 204 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake L-812.091400BF High-load linear stage; 2-phase stepper motor; 204 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake; folded drivetrain L-812.171400 High-load linear stage; 2-phase stepper motor; 407 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake L-812.171400B High-load linear stage; 2-phase stepper motor; 407 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake L-812.171400BF High-load linear stage; 2-phase stepper motor; 407 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake; folded drivetrain L-812.251400 High-load linear stage; 2-phase stepper motor; 610 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake L-812.251400B High-load linear stage; 2-phase stepper motor; 610 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake L-812.251400BF High-load linear stage; 2-phase stepper motor; 610 mm travel range; 500 N load capacity; 100 mm/s maximum velocity; ball screw; electromagnetic holding brake; folded drivetrain Page 16 19.10.2022 WWW.PI.WS

Order Information L-812.059432 High-load linear stage; synchronous servo motor to 310 V; 102 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.059432B High-load linear stage; synchronous servo motor to 310 V; 102 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.059432BF High-load linear stage; synchronous servo motor to 310 V; 102 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake; folded drivetrain L-812.099432 High-load linear stage; synchronous servo motor to 310 V; 204 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.099432B High-load linear stage; synchronous servo motor to 310 V; 204 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.099432BF High-load linear stage; synchronous servo motor to 310 V; 204 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake; folded drivetrain L-812.139432 High-load linear stage; synchronous servo motor to 310 V; 304 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.179432 High-load linear stage; synchronous servo motor to 310 V; 407 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.179432B High-load linear stage; synchronous servo motor to 310 V; 407 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.179432BF High-load linear stage; synchronous servo motor to 310 V; 407 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake; folded drivetrain L-812.259432 High-load linear stage; synchronous servo motor to 310 V; 610 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake L-812.259432B High-load linear stage; synchronous servo motor to 310 V; 610 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake Page 17 19.10.2022 WWW.PI.WS

Order Information L-812.259432BF High-load linear stage; synchronous servo motor to 310 V; 610 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; incremental rotary encoder; electromagnetic holding brake; folded drivetrain L-812.059453 High-load linear stage; synchronous servo motor to 310 V; 102 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.059453B High-load linear stage; synchronous servo motor to 310 V; 102 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.059453BF High-load linear stage; synchronous servo motor to 310 V; 102 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake; folded drivetrain L-812.099453 High-load linear stage; synchronous servo motor to 310 V; 204 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.099453B High-load linear stage; synchronous servo motor to 310 V; 204 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.099453BF High-load linear stage; synchronous servo motor to 310 V; 204 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake; folded drivetrain L-812.179453 High-load linear stage; synchronous servo motor to 310 V; 407 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.179453B High-load linear stage; synchronous servo motor to 310 V; 407 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.179453BF High-load linear stage; synchronous servo motor to 310 V; 407 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake; folded drivetrain L-812.259453 High-load linear stage; synchronous servo motor to 310 V; 610 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.259453B High-load linear stage; synchronous servo motor to 310 V; 610 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake L-812.259453BF High-load linear stage; synchronous servo motor to 310 V; 610 mm travel range; 500 N load capacity; 300 mm/s maximum velo- city; ball screw; absolute rotary encoder, multiturn; electromagnetic holding brake; folded drivetrain Page 18 19.10.2022 WWW.PI.WS