高剛性Z軸ピエゾステージ P-733.Z

High Dynamics Z Nanopositioner / Scanner Direct Position Measuring and Clear Aperture P-733.Z  Travel range 100 µm  Direct position measuring with capacitive sensors  Resolution to 0.3 nm, closed loop  Clear aperture 50 mm × 50 mm  Other versions available with additional degrees of freedom  XY and XYZ versions available  Vacuum-compatible versions on request Application fields  Scanning microscopy  Confocal microscopy  Mask/wafer positioning  Surface measuring technology  Nanoimprinting  Micromanipulation  Image processing / stabilization  Nanopositioning with high flatness and straightness of motion Outstanding lifetime thanks to PICMA® piezo actuators The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer- insulated actuators. 100 billion cycles without a single failure are proven. Subnanometer resolution with capacitive sensors Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range. High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range. 29.10.2020

Automatic configuration and fast component exchange Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on. Maximum accuracy due to direct position measuring Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control. Specifications P-733.ZCD / P-733.ZCL Unit Tolerance Active axes Z Motion and positioning Integrated sensor Capacitive Travel range at -20 to 120 V, open loop 115 µm +20 % / -0 % Travel range, closed loop 100 µm Resolution, open loop 0.2 nm typ. Resolution, closed loop 0.3 nm typ. Linearity error 0.03 % typ. Repeatability <2 nm typ. Rotation around Z <10 µrad typ. Rotation around X <5 µrad typ. Rotation around Y <5 µrad typ. Mechanical properties Stiffness 2.5 N/µm ±20 % Resonant frequency, no load 700 Hz ±20 % Resonant frequency, under load, 120 g 530 Hz ±20 % Resonant frequency, under load, 200 g 415 Hz ±20 % Push / pull force capacity 50 / 20 N max. Drive properties Piezo ceramic PICMA® P-885 Electrical capacitance 6 µF ±20 % Miscellaneous Operating temperature range -20 to 80 °C Material Aluminum Dimensions 100 mm × 100 mm × 25 mm Mass 580 g ±5 % Cable length 1.5 m ±10 mm CD version: D-sub 7W2 (m) Sensor / voltage connection CL version: LEMO Recommended electronics E-503, E-505, E-610, E-621, E-625, E-754 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. 29.10.2020

Drawings / Images P-733.Z, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. 29.10.2020

Step response of the P-733.ZCD. Settling time is 10 ms. Ordering Information P-733.ZCD Compact, precision nanopositioner Z stage, 100 µm, capacitive sensor, D-sub connector P-733.ZCL Compact, precision nanopositioner Z stage, 100 µm, capacitive sensor, LEMO connectors Accessories P-733.AP1 Adapter plate for mounting P-733 piezo stages onto M-545 XY stages and U-760 XY stage systems 29.10.2020